Nano-electromechanical systems (NEMS) include the integration of mechanical elements, sensors, actuators and electronics on a typical nano-scale silicon substrate. This is an advanced, miniaturized form of microelectromechanical systems (MEMS). Some of the most commonly used NEMS devices are tweezers, accelerometers, sensors, and cantilevers. These devices are advanced and compact forms of microelectromechanical systems (MEMS). NEMS […]
